Journal of Microelectromechanical Systems
Journal of Microelectromechanical Systems > 2012 > 21 > 6 > 1533 - 1563
Journal of Microelectromechanical Systems > 2012 > 21 > 6 > 1347 - 1356
Journal of Microelectromechanical Systems > 2012 > 21 > 6 > 1288 - 1290
Journal of Microelectromechanical Systems > 2012 > 21 > 6 > 1276 - 1278
Journal of Microelectromechanical Systems > 2012 > 21 > 6 > 1329 - 1337
Journal of Microelectromechanical Systems > 2012 > 21 > 6 > 1484 - 1491
Journal of Microelectromechanical Systems > 2012 > 21 > 6 > 1392 - 1401
Journal of Microelectromechanical Systems > 2012 > 21 > 6 > 1311 - 1320
Journal of Microelectromechanical Systems > 2012 > 21 > 6 > 1402 - 1409
Journal of Microelectromechanical Systems > 2012 > 21 > 6 > 1321 - 1328
Journal of Microelectromechanical Systems > 2012 > 21 > 6 > 1338 - 1346
Journal of Microelectromechanical Systems > 2012 > 21 > 6 > 1471 - 1483
Journal of Microelectromechanical Systems > 2012 > 21 > 6 > 1410 - 1417
Journal of Microelectromechanical Systems > 2012 > 21 > 6 > 1375 - 1381
Journal of Microelectromechanical Systems > 2012 > 21 > 6 > 1291 - 1302
Journal of Microelectromechanical Systems > 2012 > 21 > 6 > 1418 - 1425
Journal of Microelectromechanical Systems > 2012 > 21 > 6 > 1436 - 1444
Journal of Microelectromechanical Systems > 2012 > 21 > 6 > 1382 - 1391
Journal of Microelectromechanical Systems > 2012 > 21 > 6 > 1303 - 1310
Journal of Microelectromechanical Systems > 2012 > 21 > 6 > 1365 - 1374